Author Details
Халматов, А. С.
| Issue | Section | Title | File |
| No 7 (2024) | Articles | The effect of atmospheric oxide thermodesorption on negative-ion atomic and cluster sputtering of silicon single crystal by cesium ions |
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
channeling
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
optical properties
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Current Issue
No 3 (2025)
Information
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Pay with
User
Subscription
Login to verify subscription
Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
channeling
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
optical properties
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Current Issue
No 3 (2025)
Information