Author Details
Ефимов, Д. Д.
| Issue | Section | Title | File |
| No 10 (2024) | Articles | Investigation of high-intensity implantation of titanium ions into silicon under conditions of the beam’s energy impact on the surface |
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Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
channeling
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
optical properties
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Current Issue
No 3 (2025)
Information
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Pay with
User
Subscription
Login to verify subscription
Keywords
X-ray diffraction
X-ray photoelectron spectroscopy
atomic force microscopy
channeling
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
optical properties
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
zinc oxide
Current Issue
No 3 (2025)
Information