TECHNOLOGIES
| Issue | Title | File | |
| Vol 52, No 2 (2023) | Plasma Parameters and Kinetics of Reactive Ion Etching of SiO2 and Si3N4 in an HBr/Cl2/Ar Mixture |
 (Rus) |
|
| Efremov A.M., Betelin V.B., Kwon K. | |||
| Vol 52, No 2 (2023) | Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide |
(Rus) |
|
| Kerimov E.A. | |||
| Vol 52, No 1 (2023) | Параметры газовой фазы и кинетика реактивно-ионного травления SiO2 в плазме CF4/C4F8/Ar/He |
(Rus) |
|
| Ефремов А., Kwon K. | |||
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